Impact of Beam Thickness and Air Gap on the Performance of Cantilever MEMS Switch
نویسندگان
چکیده
This paper represents the impact of beam thickness and air gap upon the performance of cantilever MEMS switches having different beam materials (Al, Au metals). A comparative analysis of spring constant, effective mass, pull-in voltage, capacitance of cantilever based MEMS switch has been performed by 3D simulation using COMSOL Multiphysics based on Finite Element Method [FEM]. Different parameters like beam displacement, thickness variation of metal beams, electrostatic forces over beam have been calculated.
منابع مشابه
Finite Element Solutions of Cantilever and Fixed Actuator Beams Using Augmented Lagrangian Methods
In this paper we develop a numerical procedure using finite element and augmented Lagrangian meth-ods that simulates electro-mechanical pull-in states of both cantilever and fixed beams in microelectromechanical systems (MEMS) switches. We devise the augmented Lagrangian methods for the well-known Euler-Bernoulli beam equation which also takes into consideration of the fringing effect of electr...
متن کاملDesign and simulation of a RF MEMS shunt capacitive switch with low actuation voltage, low loss and high isolation
According to contact type, RF MEMS switches are generally classified into two categories: Capacitive switches and Metal-to-Metal ones. The capacitive switches are capable to tolerate a higher frequency range and more power than M-to-M switches. This paper presents a cantilever shunt capacitive RF MEMS switch with characteristics such as low trigger voltage, high capacitive ratio, short switchin...
متن کاملRadio Frequency-micro Electromechanical System Switch with High Speed and Low Actuated Voltage
This paper presents a novel RF MEMS (Micro Electromechanical System) fixed-fixed switch for very fast switching. Using the obtained equations, the switching time depends on the stiffness and effective mass of the switch beam so that the switching time will be decreased by higher stiffness (spring constant) and lower effective mass. In new design, the suspension bridge is a three-layer beam so t...
متن کاملFabrication and Characterization of a New MEMS Capacitive Microphone using Perforated Diaphragm
In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...
متن کاملNonlinear Dynamic Analysis of Cracked Micro-Beams Below and at the Onset of Dynamic Pull-In Instability
In this paper, the effect of the crack on dynamic behavior of cracked micro-beam in the presence of DC and AC loads are investigated. By applying the residual axial stress and fringing field stress, a nonlinear analytical model of cracked micro-beam is presented and crack is modeled by a massless rotational spring. The governing equation of the system is solved using Galerkin procedure and shoo...
متن کامل